Tool Manager: Brian Bowman

Tool Location: Duffield 220

3100 AFM
3100 AFM


  • 90µm Square XY imaging area
  • 6µm Z Range
  • 1% Integral non linearity (XY)
  • < 0.05nm RMS vertical noise floor
  • Samples up to 150 mm diameter and 12 mm thick
  • 150 mm vacuum chuck for hard disks, semiconductor wafers, and other samples
  • Enhanced motorized positioning: 125 x 100 mm inspectable area
  • Optical microscope: 150 to 675 µm horizontal viewing area with 1.5 µm resolution


Helpful links:

Instrument protocols in the "downloads" menu to the right.

Gwyddion, free program for AFM image visualization and analysis

Source for specialized AFM probes and tips

Offline Nanoscope Software v. 5.31

Offline Nanoscope Software v.6.14