Tool Manager: Brian Bowman

Location: Clean Room

Branson Asher

Features:

  • 12" (dia.) X 20" (d) Low Particulate Quartz Chamber.
  • Easy loading and unloading height.
  • Faraday Cage for up to 6" Wafers.
  • Slow Evacuation & Slow Purge Process Steps.
  • 3 Process step timers, settable from 0.0 to 99.9 minutes.
  • 2 Rotometer Controlled Process Gas Channels (O2 and N2).
  • 3 MFC Controlled Process Gas Controller available, ask NBTC Staff about using alternate Process gases.
  • Rotometer Controlled Purge Gas Channel (N2)
  • Digital Chamber Pressure Readout.
  • Automatic or Manual operation.
  • ENI 1250 Watt 13.56 MHz RF Generator.

Instrument protocols in the "downloads" menu to the right.