Tool Manager: Brian Bowman

Location: 2nd floor corridor


  • Gentle drying of 4, 6, and 8 inch diameter substrates using SuperCritical CO2.
  • Small chip sample holder available for irregular samples.
  • Capable of displacing any standard sample medium (e.g. propanol, methanol, ethanol, etc.).
  • Standard process cycle; or user settable cycle times, temperatures, and pressures.
  • Uses "Bone Dry" 99.9% pure CO2 as the displacement medium.
  • CO2 pressures up to 85 bar (1247 psi or 8.6 MPa).
  • CO2 temperatures adjustable from 18 to 37° C.



  • SEM sample prep.
  • Provides uniform surface tension on self assembled monolayer (SAM) coated surfaces.
  • Functional protein coating on atomic force microscope (AFM) cantilever tips to be used as nano-electrodes.
  • Characteerizing sample solubility in supercritical CO2.
  • Using the supercritical properties of carbon dioxide as a way to thoroughly clean microfluidic devices between uses.


Instrument protocol and brochure in the "downloads" menu to the right.