Tool Manager: Brian Bowman

Location: Clean Room

Features

  • Thin film deposition system - up to six different layers can be deposited
  • 32" diameter water-cooled chamber
  • Rotating or stationary conformal planetary substrate holders with 57 100mm wafer capacity on water-cooled track
  • Rotating or stationary planetary substrate holder for lift-off with 7 100mm wafer capacity
  • Heated substrate option with 4 banks of quartz heaters
  • Metals include: Al, Au, Cr, Ti, Pt, Ni, Cu, Ta, SiO2

 

Helpful Links

Instrument protocols in the "downloads" menu to the right.