Tool Manager: Brian Bowman
Location: Duffield 201
Profilometry allows users to get a 2D trace of topographic features on a surface. The NBTC Profilometer is most frequently used to determine film thickness, channel depth of microfluidic devices, and roughness of treated surfaces.
- Measurement Range: 100 Angstrom to 1 mm deep.
- Resolution: 1-200A depending on measurement range
- Sample size: up to 150 mm (6") substrates up to 5 mm thick.
- Scan length: 50 to 30,000 microns long.
- 12.5 or 25 micron stylus tips available.
- Stylus force range: 1 to 15 mg.
- X-Y stage translation: 20 x 80 mm, rotates 360 degrees.
- Photo capability with 70 to 280 X camera (3.5 to 0.86 mm field of view)
- Up to 30,000 exportable data points per scan.
- Easy to set and store personal scan setting.
- Measurement parameters available: Roughness (Ra, Rq, Rp, Rv, Rt, Rz), Waviness (Wa, Wq, Wp, Wv, Wt), Step Height (avg. step ht., avg. ht., max. peak, max. valley, max. ht., peak to valley, high spot sount, peak count), Geometric measurements (area, slope, volume, radius, perimeter, bearing, ratio, Sm)
Instrument protocols in the "downloads" menu to the right.